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@ARTICLE{Volmer:904840,
      author       = {Volmer, Frank and Seidler, Inga and Bisswanger, Timo and
                      Tu, Jhih-Sian and Schreiber, Lars and Stampfer, Christoph
                      and Beschoten, Bernd},
      title        = {{H}ow to solve problems in micro- and nanofabrication
                      caused by the emission of electrons and charged metal atoms
                      during e-beam evaporation},
      journal      = {Journal of physics / D},
      volume       = {54},
      number       = {22},
      issn         = {0022-3727},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {FZJ-2022-00164},
      pages        = {225304 -},
      year         = {2021},
      cin          = {PGI-11},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-11-20170113},
      pnm          = {5221 - Advanced Solid-State Qubits and Qubit Systems
                      (POF4-522)},
      pid          = {G:(DE-HGF)POF4-5221},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000626867200001},
      doi          = {10.1088/1361-6463/abe89b},
      url          = {https://juser.fz-juelich.de/record/904840},
}