Hauptseite > Publikationsdatenbank > How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation > print

001     904840
005     20220131120438.0
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100 1 _ |a Volmer, Frank
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245 _ _ |a How to solve problems in micro- and nanofabrication caused by the emission of electrons and charged metal atoms during e-beam evaporation
260 _ _ |a Bristol
|c 2021
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700 1 _ |a Bisswanger, Timo
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700 1 _ |a Tu, Jhih-Sian
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700 1 _ |a Schreiber, Lars
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700 1 _ |a Stampfer, Christoph
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700 1 _ |a Beschoten, Bernd
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773 _ _ |a 10.1088/1361-6463/abe89b
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856 4 _ |u https://juser.fz-juelich.de/record/904840/files/Volmer_2021_J._Phys._D%20_Appl._Phys._54_225304.pdf
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