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| Home > Workflow collections > Publication Charges > Processing map to control the erosion of Y 2 O 3 in fluorine based etching plasmas > Access to Fulltext |
| Home > Workflow collections > Publication Charges > Processing map to control the erosion of Y 2 O 3 in fluorine based etching plasmas > Access to Fulltext |
 Journal of the American Ceramic Society - 2022 - Kindelmann - Processing map to control the erosion of Y2O3 in fluorine
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