Home > Publications database > Plasma parameters and tungsten sputter rates in a high-frequency CCP > Access to Fulltext
 
 
Main document file(s):
      5.0083613
    version 1
    5.0083613.pdf [2.73 MB] 04 May 2022, 16:26 OpenAccess
      Postprint_Sackers
    version 1
    Postprint_Sackers.pdf [889.28 KB] 03 May 2022, 09:58 OpenAccess
Similar records

JuSER :: Search :: Submit :: Personalize :: Help
Powered by Invenio v1.1.7 | join2_v2510-2-gd5e4e3e
Maintained by juser@fz-juelich.de

Impressum | Data Privacy Policy
This site is also available in the following languages:
Deutsch  English