Home > Publications database > Plasma parameters and tungsten sputter rates in a high-frequency CCP > Access to Fulltext
 
 
Main document file(s):
      5.0083613
    version 1
    5.0083613.pdf [2.73 MB] 04 May 2022, 16:26 OpenAccess
      Postprint_Sackers
    version 1
    Postprint_Sackers.pdf [889.28 KB] 03 May 2022, 09:58 OpenAccess
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