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000908883 1001_ $$0P:(DE-Juel1)165965$$aZheng, Fengshan$$b0$$eCorresponding author$$ufzj
000908883 245__ $$aElectron-beam-induced charging of an Al2O3 nanotip studied using off-axis electron holography
000908883 260__ $$aAmsterdam$$bElsevier Science$$c2022
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000908883 520__ $$aElectrostatic charging of specimens during electron, photon or ion irradiation is a complicated and poorly understood phenomenon, which can affect the acquisition and interpretation of experimental data and alter the functional properties of the constituent materials. It is usually linked to secondary electron emission, but also depends on the geometry and electrical properties of the specimen. Here, we use off-axis electron holography in the transmission electron microscope to study electron-beam-induced charging of an insulating AlO3 nanotip on a conducting support. The measurements are performed under parallel electron illumination conditions as a function of specimen temperature, electron dose, primary electron energy and surface cleanliness. We observe a lack of reproducibility of charge density measurements after cycling the specimen temperature. Surprisingly, we find both positively and negatively charged regions in closely adjacent parts of the specimen.
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000908883 536__ $$0G:(GEPRIS)167917811$$aDFG project 167917811 - SFB 917: Resistiv schaltende Chalkogenide für zukünftige Elektronikanwendungen: Struktur, Kinetik und Bauelementskalierung "Nanoswitches" (167917811)$$c167917811$$x3
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000908883 7001_ $$0P:(DE-HGF)0$$aBeleggia, Marco$$b1
000908883 7001_ $$0P:(DE-Juel1)159136$$aMigunov, Vadim$$b2
000908883 7001_ $$0P:(DE-HGF)0$$aPozzi, Giulio$$b3
000908883 7001_ $$0P:(DE-Juel1)144121$$aDunin-Borkowski, Rafal$$b4$$ufzj
000908883 773__ $$0PERI:(DE-600)1479043-9$$a10.1016/j.ultramic.2022.113593$$gVol. 241, p. 113593 -$$p113593$$tUltramicroscopy$$v241$$x0304-3991$$y2022
000908883 8564_ $$uhttps://juser.fz-juelich.de/record/908883/files/1-s2.0-S0304399122001176-main.pdf$$yOpenAccess
000908883 8564_ $$uhttps://juser.fz-juelich.de/record/908883/files/Electron-beam-induced%20charging.pdf$$yOpenAccess
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