Journal Article

FZJ-2022-02896

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Electron-beam-induced charging of an Al2O3 nanotip studied using off-axis electron holography

Zheng, F. (Corresponding author)FZJ* ; Beleggia, M. ; Migunov, V. ; Pozzi, G. ; Dunin-Borkowski, R.FZJ*

2022
Elsevier Science Amsterdam

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Please use a persistent id in citations: http://hdl.handle.net/2128/31801  doi:10.1016/j.ultramic.2022.113593

Abstract: Electrostatic charging of specimens during electron, photon or ion irradiation is a complicated and poorly understood phenomenon, which can affect the acquisition and interpretation of experimental data and alter the functional properties of the constituent materials. It is usually linked to secondary electron emission, but also depends on the geometry and electrical properties of the specimen. Here, we use off-axis electron holography in the transmission electron microscope to study electron-beam-induced charging of an insulating AlO3 nanotip on a conducting support. The measurements are performed under parallel electron illumination conditions as a function of specimen temperature, electron dose, primary electron energy and surface cleanliness. We observe a lack of reproducibility of charge density measurements after cycling the specimen temperature. Surprisingly, we find both positively and negatively charged regions in closely adjacent parts of the specimen.

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Contributing Institute(s):

1. Physik Nanoskaliger Systeme (ER-C-1)

Research Program(s):

1. 5351 - Platform for Correlative, In Situ and Operando Characterization (POF4-535) (POF4-535)
2. SIMDALEE2 - Sources, Interaction with Matter, Detection and Analysis ofLow Energy Electrons 2 (606988) (606988)
3. ESTEEM3 - Enabling Science and Technology through European Electron Microscopy (823717) (823717)
4. DFG project 167917811 - SFB 917: Resistiv schaltende Chalkogenide für zukünftige Elektronikanwendungen: Struktur, Kinetik und Bauelementskalierung "Nanoswitches" (167917811) (167917811)
5. Q-SORT - QUANTUM SORTER (766970) (766970)

Appears in the scientific report 2022

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