TY - JOUR
AU - Wallburg, Florian
AU - Kuna, Meinhard
AU - Budnitzki, Michael
AU - Schoenfelder, Stephan
TI - A material removal coefficient for diamond wire sawing of silicon
JO - Wear
VL - 504-505
SN - 0043-1648
CY - Amsterdam [u.a.]
PB - Elsevier Science
M1 - FZJ-2022-04107
SP - 204400 -
PY - 2022
AB - Diamond wire sawing (DWS) of silicon wafers has replaced loose abrasive sawing (LAS) within a very short time, mainly due to the enormous cost pressure in the photovoltaic industry. However, the LAS process is still much better investigated and understood from a mechanics point of view. This lack of micromechanically substantiated process knowledge is a major challenge in optimisation for a reliable process and the associated improvement in the quality of the products. The present work aims to contribute to this field by deriving a material removal coefficient that can be used at the process level in well-established material removal laws such as the Preston or Archard equation. The results show that the removal coefficient calculated on the basis of finite element simulations indicates a significant increase in material removal for common DWS sawing conditions in comparison to LAS, which is in good agreement with experimental findings.
LB - PUB:(DE-HGF)16
UR - <Go to ISI:>//WOS:000815795300003
DO - DOI:10.1016/j.wear.2022.204400
UR - https://juser.fz-juelich.de/record/910737
ER -