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Doping modulation in GaN imaged by croaa-sectional scanning tunneling microscopy

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2009
American Institute of Physics Melville, NY

Applied physics letters 94, 162110 () [10.1063/1.3123258]

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Abstract: We investigated the imaging mechanisms of a Si doping modulation in GaN by cross-sectional scanning tunneling microscopy (STM). The Si doping modulation gives rise to a voltage and tip dependent height modulation of at least 0.4 A. The origin of the height modulation in constant-current STM images is traced to two mechanisms. A doping-induced modu-lation of the band edge energies yields a voltage dependent electronic contrast and an additional mechanical relaxation of the doping-induced strain at the cleavage surface is respon-sible for a voltage independent modulation of 0.35 A.

Keyword(s): J ; anelastic relaxation (auto) ; doping profiles (auto) ; gallium compounds (auto) ; III-V semiconductors (auto) ; scanning tunnelling microscopy (auto) ; semiconductor doping (auto) ; silicon (auto) ; wide band gap semiconductors (auto)

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Note: The authors thank the Deutsche Forschungsgemeinschaft for financial support and U. Breuer and H. John for the SIMS measurements.

Contributing Institute(s):
  1. Mikrostrukturforschung (IFF-8)
Research Program(s):
  1. Grundlagen für zukünftige Informationstechnologien (P42)

Appears in the scientific report 2009
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 Record created 2012-11-13, last modified 2024-06-10