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| Hauptseite > Publikationsdatenbank > Scanning Electron Microscopy (SEM) |
| Hauptseite > Publikationsdatenbank > Scanning Electron Microscopy (SEM) |
| Talk (non-conference) (Other) | FZJ-2025-00024 |
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2024
Abstract: As with other microscopes, the main function of the Scanning Electron Microscope (SEM) is to examine small objects that are imperceptible to human sight. It does that by striking the sample surface with an electron beam of high energy. [1] These incident electrons, also called primary electrons, penetrate the sample promoting a variety of signals, including secondary electrons (SE), backscattered electrons (BSE), and X-ray emissions (Figure 1). [2] As each signal provides different information about the sample, it is important to understand the electron beam-sample interaction.The signals can be regulated by adjusting the parameters of the setup of the SEM. The three major components are the following: i. The electron column, where the electron beam is generated from an electron gun. The beam then travels towards the sample, focused by electromagnetic lenses. [2]ii. The sample chamber is located at the base of the electron column and is kept under vacuum. In there, the beam strikes the sample and SE, BSE and X-Ray are emitted. Next, the detectors collect and convert the signals into electrical pulses for latter processing. [1]iii. The electronic controls are represented by the interface of the SEM with the operator. It allows the user to handle the microscope and control the acquisition of information.Thus, the electron beam-sample interaction, the type of signals obtained, and the fundamental adjustment of the setup are the key topics to be addressed, so that high-quality information can be acquired by the operator of the SEM.
Keyword(s): Basic research (1st) ; Crystallography (2nd) ; Materials Science (2nd)
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