% IMPORTANT: The following is UTF-8 encoded. This means that in the presence % of non-ASCII characters, it will not work with BibTeX 0.99 or older. % Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or % “biber”. @ARTICLE{Cheng:11289, author = {Cheng, X. and Xu, D. and Sun, Q.-Q. and He, D. and Wang, Z. and Yu, Y. and Zhang, D.W. and Zhao, Q.}, title = {{A}l2{O}3/{N}b{A}l{O}/{A}l2{O}3 sandwich gate dielectric film on {I}n{P}}, journal = {Applied physics letters}, volume = {96}, issn = {0003-6951}, address = {Melville, NY}, publisher = {American Institute of Physics}, reportid = {PreJuSER-11289}, pages = {022904}, year = {2010}, note = {This work was supported by the following Chinese foundation: NSF (Grant No. 10775166), Zhejiang Province STF (Grant No. 2008C31002), and Wenzou STF (Grant No. G20060099).}, abstract = {Al2O3/NbAlO/Al2O3 sandwich dielectric films were grown on InP substrate and annealed. X-ray reflectivity measurements suggested that 1.0 nm interfacial layer existed at InP interface, x-ray diffraction and high resolution transmission electron microscopy indicated the films were crystallized. X-ray photoelectron spectra indicated the oxidization of InP substrate, and the valence-band offset between the dielectric film and InP interface was calculated to be 3.1 eV. The electrical measurements indicated that the leakage current density was 40 mA/cm(2) at gate bias of 1 V, and the equivalent oxide thickness and the dielectric constant were 1.7 and 20 nm, respectively.}, keywords = {J (WoSType)}, cin = {IBN-1 / JARA-FIT}, ddc = {530}, cid = {I:(DE-Juel1)VDB799 / $I:(DE-82)080009_20140620$}, pnm = {Grundlagen für zukünftige Informationstechnologien}, pid = {G:(DE-Juel1)FUEK412}, shelfmark = {Physics, Applied}, typ = {PUB:(DE-HGF)16}, UT = {WOS:000273689400046}, doi = {10.1063/1.3292217}, url = {https://juser.fz-juelich.de/record/11289}, }