| Home > Publications database > Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface |
| Journal Article | FZJ-2013-01816 |
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2012
American Institute of Physics
Melville, NY
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Please use a persistent id in citations: http://hdl.handle.net/2128/17114 doi:10.1063/1.4709729
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