TY - CONF AU - Hardtdegen, Hilde AU - Winden, Andreas AU - Fox, Alfred AU - Haab, Anna AU - Grützmacher, Detlev AU - Kordos, Peter AU - Gregusova, Dagmar AU - Maros, Michel AU - Mikulics, Martin TI - Micro-PL for MOVPE grown AlGaN/GaN HFET structure optimization M1 - FZJ-2014-00599 SN - 978-3-89336-870-9 SP - 59 - 62 PY - 2013 AB - Micro-photoluminescence (μ-PL) studies were performed on AlGaN/GaN heterostructure field effect transistor AB - (HFET) structures with different gate recessing depths. It was found that μ-PL is the method of choice for AB - detecting strain in the lateral resolution relevant for HFET device length scales and therefore useful for AB - structure optimization. Strain is partially relaxed and non-uniform after recessing. The PL-results elucidate the AB - device characteristics and partially explain the reduced charge density observed. T2 - 15th European Workshop on Metalorganic Vapour Phase Epitaxie CY - 2 Jun 2013 - 5 Jun 2013, Aachen (Germany) Y2 - 2 Jun 2013 - 5 Jun 2013 M2 - Aachen, Germany LB - PUB:(DE-HGF)8 UR - https://juser.fz-juelich.de/record/150545 ER -