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Application of Optical Emission Spectroscopy for Diagnostics of SPS and PS-PVD
Mauer, G. (Corresponding Author)FZJ* ; Vassen, R.FZJ*
2014
201428th International Conference on Surface Modification Technologies, Tampere University of Technology, SMT 28, TampereTampere, Finnland, 16 Jun 2014 - 18 Jun 20142014-06-162014-06-18
Contributing Institute(s):
- Werkstoffsynthese und Herstellungsverfahren (IEK-1)
Research Program(s):
- 122 - Power Plants (POF2-122) (POF2-122)
Appears in the scientific report
2014