Conference Presentation (Other) FZJ-2014-03418

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Application of Optical Emission Spectroscopy for Diagnostics of SPS and PS-PVD

 ;

2014

28th International Conference on Surface Modification Technologies, Tampere University of Technology, SMT 28, TampereTampere, Finnland, 16 Jun 2014 - 18 Jun 20142014-06-162014-06-18


Contributing Institute(s):
  1. Werkstoffsynthese und Herstellungsverfahren (IEK-1)
Research Program(s):
  1. 122 - Power Plants (POF2-122) (POF2-122)

Appears in the scientific report 2014
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Document types > Presentations > Conference Presentations
Institute Collections > IMD > IMD-2
Workflow collections > Public records
IEK > IEK-1
Publications database

 Record created 2014-06-06, last modified 2024-07-08



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