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@ARTICLE{Rieger:156128,
author = {Rieger, Torsten and Jörres, Torsten and Vogel, J. and
Biermanns, A. and Pietsch, U. and Grützmacher, Detlev and
Lepsa, Mihail Ion},
title = {{C}rystallization of ${H}f{O}_2$ in ${I}n{A}s/{H}f{O}_2$
core–shell nanowires},
journal = {Nanotechnology},
volume = {25},
number = {40},
issn = {1361-6528},
address = {Bristol},
publisher = {IOP Publ.},
reportid = {FZJ-2014-04991},
pages = {405701},
year = {2014},
abstract = {We report the impact of deposition parameters on the
structure of HfO2 covering InAs nanowires (NWs) being
potential candidates for future field-effect transistors
(FETs). Molecular beam epitaxial-grown Au-free InAs NWs were
covered with HfO2 deposited by atomic-layer deposition. The
impact of the film thickness as well as the deposition
temperature on the occurrence and amount of crystalline HfO2
regions was investigated by high-resolution transmission
electron microscopy (TEM) and x-ray diffraction. Compared to
the deposition on planar Si substrates, the formation
probability of crystalline HfO2 on InAs NWs is significantly
enhanced. Here, even 3 nm thick films deposited at 250 °C
are partly crystalline. Similarly, a low deposition
temperature of 125 °C does not result in completely
amorphous 10 nm thick HfO2 films, they contain monoclinic as
well as orthorhombic HfO2 nanocrystals. Combining HfO2 and
Al2O3 into a laminate structure is capable of suppressing
the formation of crystalline HfO2 grains.},
cin = {PGI-9},
ddc = {530},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {421 - Frontiers of charge based Electronics (POF2-421)},
pid = {G:(DE-HGF)POF2-421},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000342503800007},
doi = {10.1088/0957-4484/25/40/405701},
url = {https://juser.fz-juelich.de/record/156128},
}