Contribution to a conference proceedings FZJ-2015-02681

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III-nitride nano-LEDs for single photon lithography

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2014

ISBN: 978-147995474-2

Conference Proceedings - 10th International Conference on Advanced Semiconductor Devices and Microsystems, ASDAM 2014, SmoleniceSmolenice, Slovakei, 20 Oct 2014 - 22 Oct 20142014-10-202014-10-22 85-88 () [10.1109/ASDAM.2014.6998652]

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Abstract: We fabricated and tested III-nitride (p-GaN/MQW/n-GaN/sapphire) based nano-LEDs designed for operation in the single photon lithography technique. The band edge luminescence energy of the III-nitride nano-LEDs depends linearly on the structure size. Our studies provide clear evidence that our technological process for the vertically integrated nano-LED emitters is perfectly suited for long term operation without any indication of degradation effects. This novel technology shows strong potential for a future flexible single photon lithography [1] which is applicable for molecular photonic and electronic circuits.


Contributing Institute(s):
  1. Halbleiter-Nanoelektronik (PGI-9)
Research Program(s):
  1. 421 - Frontiers of charge based Electronics (POF2-421) (POF2-421)

Appears in the scientific report 2014
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