Journal Article FZJ-2015-03823

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Three-dimensional fabrication and characterisation of core-shell nano-columns using electron beam patterning of Ge-doped SiO$_{2}$

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2012
American Inst. of Physics Melville, NY

Applied physics letters 100(26), 263113 - () [10.1063/1.4731765]

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Abstract: A focused electron beam in a scanning transmission electron microscope (STEM) is used to create arrays of core-shell structures in a specimen of amorphous SiO2 doped with Ge. The same electron microscope is then used to measure the changes that occurred in the specimen in three dimensions using electron tomography. The results show that transformations in insulators that have been subjected to intense irradiation using charged particles can be studied directly in three dimensions. The fabricatedstructures include core-shell nano-columns, sputtered regions, voids, and clusters.

Classification:

Contributing Institute(s):
  1. Mikrostrukturforschung (PGI-5)
Research Program(s):
  1. 42G - Peter Grünberg-Centre (PG-C) (POF2-42G41) (POF2-42G41)

Database coverage:
Medline ; OpenAccess ; Current Contents - Physical, Chemical and Earth Sciences ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection
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 Record created 2015-06-10, last modified 2024-06-10