TY - JOUR AU - Xu, Dawei AU - Cheng, Xinhong AU - Yu, Yuehui AU - Wang, Zhongjian AU - Cao, Duo AU - Xia, Chao AU - Liu, Linjie AU - Trellenkamp, Stefan AU - Mantl, Siegfried AU - Zhao, Qing-Tai TI - Improved LDMOS performance with buried multi-finger gates JO - Microelectronic engineering VL - 122 SN - 0167-9317 CY - [S.l.] @ PB - Elsevier M1 - FZJ-2015-05217 SP - 29 - 32 PY - 2014 AB - SOI LDMOS with buried multi-finger gates (BFG) is proposed and fabricated. The BFG acts as field plate, modulating the lateral electric field distribution in the drift region (off-state) and enhances the carrier accumulation at the surface of the drift region (on-state). The proposed BFG SOI LDMOS shows a 13.6% increase of breakdown voltage, 24.4% reduction of on-resistance and 14.4% increase of the transconductance compared with the reference SOI LDMOS without BFG. LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:000336871100007 DO - DOI:10.1016/j.mee.2014.03.005 UR - https://juser.fz-juelich.de/record/203231 ER -