Journal Article

PreJuSER-24398

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Si/SiGe n-MOSFETs on thin SiGe virtual substrates prepared by means of implantation

Herzog, H.-J. ; Hackbarth, T. ; Seiler, U. ; König, U. ; Holländer, B.FZJ* ; Mantl, S.FZJ*

2002
IEEE New York, NY

Please use a persistent id in citations: http://hdl.handle.net/2128/1050

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Mikrostrukturforschung (IFF-IMF)

Research Program(s):

1. Kondensierte Materie (M02)

Appears in the scientific report 2002
Notes: This version is available at the following Publisher URL: http://ieeexplore.ieee.org/Xplore/dynhome.jsp

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Database coverage:

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