Strategies of miniaturised reference electrodes integrated in a silicon based 'one chip' pH sensor

Simonis, A.; Wang, J.; Schöning, M. J.; Lüth, H.

doi:10.3390/s30900330

Journal Article

PreJuSER-33110

Strategies of miniaturised reference electrodes integrated in a silicon based 'one chip' pH sensor

Simonis, A.FZJ* ; Lüth, H.FZJ* ; Wang, J. ; Schöning, M. J.FZJ*

2003
MDPI Basel

Sensors 3, 330 - 339 (2003) [10.3390/s30900330]

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Please use a persistent id in citations: http://hdl.handle.net/2128/21026 doi:10.3390/s30900330

Abstract: Different types of Ag/AgCl reference electrodes have been realised by means of thin- and thick-film technique. For inner electrolyte, KCl-containing membranes have been deposited and different coatings have been used to protect the reference electrode from a fast leaching out of KCl. The stability of the potential of the reference electrodes without KCl-containing membranes in 3 M KCl was about 7 hours for thin- film electrodes and up to 90 hours for thick-film electrodes. The reference electrodes with membrane were stable for more than two months. The thick-film reference electrode was integrated with a thin- film pH sensor onto one chip and the system pH sensor/reference electrode was investigated by means of capacitance/voltage (C/V) and constant capacitance (ConCap) mode.

Keyword(s): J ; reference electrode (auto) ; thin-film technique (auto) ; thick-film technique (auto) ; "one chip" sensor (auto) ; pH sensor (auto)