Journal Article PreJuSER-34850

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Measurement of the band offsets between amorphous LaAlO3 and silicon

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2004
American Institute of Physics Melville, NY

Applied physics letters 84, 726 - 729 () [10.1063/1.1644055]

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Abstract: The conduction and valence band offsets between amorphous LaAlO3 and silicon have been determined from x-ray photoelectron spectroscopy measurements. These films, which are free of interfacial SiO2, were made by molecular-beam deposition. The band line-up is type I with measured band offsets of 1.8+/-0.2 eV for electrons and 3.2+/-0.1 eV for holes. The band offsets are independent of the doping concentration in the silicon substrate as well as the amorphous LaAlO3 film thickness. These amorphous LaAlO3 films have a bandgap of 6.2+/-0.1 eV. (C) 2004 American Institute of Physics.

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Note: Record converted from VDB: 12.11.2012

Contributing Institute(s):
  1. Institut für Halbleiterschichten und Bauelemente (ISG-1)
Research Program(s):
  1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

Appears in the scientific report 2004
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