Journal Article

PreJuSER-36957

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Fabrication of arrays of SrZrO3 nanowires by pulsed laser deposition

Karthäuser, S.FZJ* ; Vasco Matias, E.FZJ* ; Dittmann, R.FZJ* ; Waser, R.FZJ*

2004
IOP Publ. Bristol

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Please use a persistent id in citations: http://hdl.handle.net/2128/989  doi:10.1088/0957-4484/15/4/002

Abstract: SrZrO3 thin films grown by pulsed laser deposition on SrRuO3-buffered SrTiO3 substrates have been investigated by means of x-ray diffraction, atomic force microscopy and Rutherford backscattering spectroscopy. The compressive stress originated in the coherent SrZrO3/SrRuO3 interface due to the lattice mismatch (approximate to-4.5%) forces epitaxial SrZrO3 to grow in a three-dimensional habit. So-deposited SrZrO3 is used to fabricate nanoarrays of dielectric wires from a nanopatterned SrRuO3 surface. The influence of the geometric shadowing effect produced by the non-perpendicular incidence of the ablated particles on the SrZrO3 growth habit is discussed.

Keyword(s): J

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Elektronische Materialien (IFF-IEM)
2. Center of Nanoelectronic Systems for Information Technology (CNI)

Research Program(s):

1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

Appears in the scientific report 2004
Notes: This version is available at the following Publisher URL: http://stacks.iop.org/0957-4484/15/S122

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