Journal Article

PreJuSER-44530

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png SrZrO3 nanopatterning using self-organizing SrRuO3 as a template

Vasco, E. ; Karthäuser, S.FZJ* ; Dittmann, R.FZJ* ; He, J.-Q.FZJ* ; Jia, C.-L.FZJ* ; Szot, K.FZJ* ; Waser, R.FZJ*

2005
Wiley-VCH Weinheim

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Please use a persistent id in citations: doi:10.1002/adma.200400718

Abstract: Nanopatterned rippled films (see Figure) are produced by epitaxial growth of pulsed-laser deposited SrRuO3 on phototreated surfaces of vicinal SrTiO3 by self-organization in a step-flow inhibited regime. The as-deposited SrRuO3 films are used as nanoscale templates to fabricate arrays of epitaxial SrZrO3 dielectric nanowires.

Keyword(s): J

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Elektronische Materialien (IFF-IEM)
2. Center of Nanoelectronic Systems for Information Technology (CNI)
3. Mikrostrukturforschung (IFF-IMF)

Research Program(s):

1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

Appears in the scientific report 2005

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