Journal Article

PreJuSER-48946

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Ferroelectric properties of epitaxial BaTiO3 thin films and heterostructures on different substrates

Trithaveesak, O.FZJ* ; Schubert, J.FZJ* ; Buchal, C.FZJ*

2005
American Institute of Physics Melville, NY

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Please use a persistent id in citations: http://hdl.handle.net/2128/2023  doi:10.1063/1.2135891

Abstract: Ferroelectric thin films of BaTiO3 and BaTiO3/SrRuO3 epitaxial heterostructures on different single-crystalline substrates were fabricated by pulsed laser deposition. The BaTiO3 films of 100-400 nm thickness show high structural perfection and c-axis-oriented growth. For the electrical characterization of the BaTiO3 in a thin-film capacitor structure, Pt top electrodes were deposited by e-beam evaporation. The results are compared to the current experimental and theoretical models. Special consideration is given to the model of charge injection from the electrodes.

Keyword(s): J

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Institut für Halbleiterschichten und Bauelemente (ISG-1)
2. Center of Nanoelectronic Systems for Information Technology (CNI)

Research Program(s):

1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

Appears in the scientific report 2005
Notes: This version is available at the following Publisher URL: http://jap.aip.org

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