Journal Article

PreJuSER-49786

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow

Donker van den, M.FZJ* ; Rech, B.FZJ* ; Finger, F.FZJ* ; Kessels, W. M. M. ; van de Sanden, M. C. M.

2005
American Institute of Physics Melville, NY

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Please use a persistent id in citations: http://hdl.handle.net/2128/1946  doi:10.1063/1.2152115

Abstract: A time-resolved optical emission spectroscopic study identified transient behavior of the excited SiH emission in a parallel plate SiH4/H-2 plasma. The transient behavior could be prevented by filling the background gas with H-2 prior to plasma ignition. Applying this condition, state-of-the-art microcrystalline silicon (mu c-Si:H) could be deposited irrespective of the applied H-2 flow, ultimately demonstrated by a 9.5% efficient solar cell deposited from pure SiH4. The results are discussed in terms of SiH4 back diffusion: an initial diffusion flux of SiH4 from the reactor's dead volume back into the plasma.

Keyword(s): J

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Institut für Photovoltaik (IPV)

Research Program(s):

1. Photovoltaik (E02)

Appears in the scientific report 2005
Notes: This version is available at the following Publisher URL: http://apl.aip.org

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