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@ARTICLE{Wensorra:53333,
      author       = {Wensorra, J. and Lepsa, M. I. and Indlekofer, K. M. and
                      Förster, A. and Jaschinsky, P. and Voigtländer, B. and
                      Pirug, G. and Lüth, H.},
      title        = {{O}hmic contacts for {G}a{A}s based nanocolumns},
      journal      = {Physica status solidi / A},
      volume       = {203},
      issn         = {0031-8965},
      address      = {Weinheim},
      publisher    = {Wiley-VCH},
      reportid     = {PreJuSER-53333},
      pages        = {3559 - 3564},
      year         = {2006},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {Nonalloyed ohmic contacts with lateral dimensions in the
                      sub-100 nm range have been processed and characterized. The
                      contacts are suitable for the fabrication of GaAs/AlGaAs
                      nanocolumns designed in a 'top down' approach. They are
                      realized on n-type GaAs using a thin low-temperature grown
                      GaAs cap layer and Ti/Au metallization. For the lateral
                      patterning of the nanoscaled ohmic contacts, electron-beam
                      lithography based on Hydrogen Silsesquioxan (HSQ) negative
                      resist is used, followed by sputtering and plasma etching of
                      the metals. The I-V characteristics show ohmic contact
                      behavior and demonstrate the scaling of the proposed
                      contacts down to 50 nm lateral dimension. The specific
                      contact resistance is situated in the range of 1-2 x 10(-5)
                      Omega cm(2). (c) 2006 WILEY-VCH Verlag GmbH $\&$ Co. KGaA,
                      Weinheim.},
      keywords     = {J (WoSType)},
      cin          = {CNI / ISG-1 / ISG-3},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB381 / I:(DE-Juel1)VDB41 / I:(DE-Juel1)VDB43},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      shelfmark    = {Materials Science, Multidisciplinary / Physics, Applied /
                      Physics, Condensed Matter},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000242536100021},
      doi          = {10.1002/pssa.200622484},
      url          = {https://juser.fz-juelich.de/record/53333},
}