Journal Article

FZJ-2016-04718

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png High Power and High Capacity 3D-Structured TiO2 Electrodes forLithium-Ion Microbatteries

Xie, J. ; Oudenhoven, J. F. M. ; Dongjiang, L. ; Chunguang, C. ; Eichel, R.-A.FZJ* ; Notten, P. H. L. (Corresponding author)FZJ*

2016
Electrochemical Soc. Pennington, NJ

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Please use a persistent id in citations: http://hdl.handle.net/2128/12294  doi:10.1149/2.1141610jes

Abstract: An on-chip compatible method to fabricate high energy density TiO2 thin film electrodes on 3D-structured silicon substrates was demonstrated. 3D-structured electrodes are fabricated by combining reactive ion etching (RIE) with low pressure chemical vapor deposition (LPCVD), enabling accurate control of the aspect ratio of substrates and the subsequent deposition of TiO2 thin film electrodes onto these structured substrates. The prepared 3D-TiO2 electrodes exhibit a current-dependent increase in storage capacity of a factor up to 16 as compared to conventional planar electrodes. In addition, these 3D electrodes also reveal excellent power and cycling performance. This work demonstrates that LPCVD is capable of depositing homogeneous film electrodes on highly structured substrates and the prepared 3D-electrodes also shows significant improve in storage capacity and power density.

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Contributing Institute(s):

1. Grundlagen der Elektrochemie (IEK-9)

Research Program(s):

1. 131 - Electrochemical Storage (POF3-131) (POF3-131)

Appears in the scientific report 2016

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Database coverage:
; ; ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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