Conference Presentation (Other)

FZJ-2016-06854

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Fabrication of UV sources for novel lithographical techniques: development of nano-LED etching procedures

Moers, J.FZJ* ; Mikulics, M. (Corresponding author)FZJ* ; Marso, M. ; Trellenkamp, S.PGI-8-PT* ; Sofer, Z. ; Grützmacher, D.FZJ* ; Hardtdegen, H.FZJ*

2016

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Contributing Institute(s):

1. Halbleiter-Nanoelektronik (PGI-9)
2. PGI-8-PT (PGI-8-PT)

Research Program(s):

1. 521 - Controlling Electron Charge-Based Phenomena (POF3-521) (POF3-521)

Appears in the scientific report 2016

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Database coverage:
No Authors Fulltext

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