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| Home > Publications database > Low Temperature Deposition of High-k/Metal Gate Stacks on High-Sn Content (Si)GeSn-Alloys > Access to Fulltext |
| Home > Publications database > Low Temperature Deposition of High-k/Metal Gate Stacks on High-Sn Content (Si)GeSn-Alloys > Access to Fulltext |
 MOScap_process_ACS_V15_final
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 acsami.6b02425
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