Journal Article

FZJ-2017-04314

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Metal-organic chemical vapor deposition enabling all-solid-state Li-ion microbatteries: A short review

Chen, C.FZJ* ; Eichel, R.-A.FZJ*RWTH* ; Notten, P. H. L. (Corresponding author)FZJ*

2017
Springer Science + Business Media B.V Dordrecht [u.a.]

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Please use a persistent id in citations: http://hdl.handle.net/2128/16145  doi:10.1007/s10832-017-0090-1

Abstract: For powering small-sized electronic devices, all-solid-state Li-ion batteries are the most promising candidates due to its safety and allowing miniaturization. Thin film deposition methods can be used for building new all-solid-state architectures. Well-known deposition methods are sputter deposition, pulsed laser deposition, sol-gel deposition, atomic layer deposition, etc. This review summarizes thin film storage materials deposited by metal-organic chemical vapor deposition (MOCVD) for all-solid-state Li-ion batteries. The deposition parameters strongly influence the quality of the films, such as surface morphology, composition, electrochemical stability and cycling performance. Some materials have been successfully deposited by MOCVD into 3D–structured substrates, revealing conformal, homogeneous and high performance battery properties.

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Contributing Institute(s):

1. Grundlagen der Elektrochemie (IEK-9)

Research Program(s):

1. 131 - Electrochemical Storage (POF3-131) (POF3-131)

Appears in the scientific report 2017

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Database coverage:
; ; Current Contents - Physical, Chemical and Earth Sciences ; IF < 5 ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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