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@ARTICLE{Duchamp:840439,
author = {Duchamp, Martial and Girard, Olivier and Pozzi, Giulio and
Soltner, Helmut and Winkler, Florian and Speen, Rolf and
Cooper, David and Dunin-Borkowski, Rafal},
title = {{F}ine electron biprism on a {S}i-on-insulator chip for
off-axis electron holography},
journal = {Ultramicroscopy},
volume = {185},
issn = {0304-3991},
address = {Amsterdam},
publisher = {Elsevier Science},
reportid = {FZJ-2017-07956},
pages = {81-89},
year = {2018},
abstract = {Off-axis electron holography allows both the amplitude and
the phase shift of an electron wavefield propagating through
a specimen in a transmission electron microscope to be
recovered. The technique requires the use of an electron
biprism to deflect an object wave and a reference wave to
form an interference pattern. Here, we introduce an approach
based on semiconductor processing technology to fabricate
fine electron biprisms with rectangular cross-sections. By
performing electrostatic calculations and preliminary
experiments, we demonstrate that such biprisms promise
improved performance for electron holography experiments.},
cin = {ER-C-1 / ZEA-1},
ddc = {570},
cid = {I:(DE-Juel1)ER-C-1-20170209 / I:(DE-Juel1)ZEA-1-20090406},
pnm = {899 - ohne Topic (POF3-899)},
pid = {G:(DE-HGF)POF3-899},
typ = {PUB:(DE-HGF)16},
pubmed = {pmid:29223803},
UT = {WOS:000423963900012},
doi = {10.1016/j.ultramic.2017.11.012},
url = {https://juser.fz-juelich.de/record/840439},
}