%0 Journal Article
%A Greczynski, G.
%A Mráz, S.
%A Ruess, H.
%A Hans, M.
%A Lu, J.
%A Hultman, L.
%A Schneider, J. M.
%T Extended metastable Al solubility in cubic VAlN by metal-ion bombardment during pulsed magnetron sputtering: film stress vs subplantation
%J Journal of applied physics
%V 122
%N 2
%@ 1089-7550
%C Melville, NY
%I American Inst. of Physics
%M FZJ-2018-01310
%P 025304 -
%D 2017
%F PUB:(DE-HGF)16
%9 Journal Article
%R 10.1063/1.4991640
%U https://juser.fz-juelich.de/record/843758