Journal Article FZJ-2018-01310

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Extended metastable Al solubility in cubic VAlN by metal-ion bombardment during pulsed magnetron sputtering: film stress vs subplantation

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2017
American Inst. of Physics Melville, NY

Journal of applied physics 122(2), 025304 - () [10.1063/1.4991640]

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Research Program(s):
  1. QUANTUM MECHANICALLY GUIDED DESIGN OF WEAR-PROTECTIVE COATINGS FOR POLYMER FORMING TOOLS (jara0151_20161101) (jara0151_20161101)

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Medline ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; IF < 5 ; JCR ; NationallizenzNationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection
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 Record created 2018-02-15, last modified 2018-02-17



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