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@ARTICLE{Greczynski:843758,
      author       = {Greczynski, G. and Mráz, S. and Ruess, H. and Hans, M. and
                      Lu, J. and Hultman, L. and Schneider, J. M.},
      title        = {{E}xtended metastable {A}l solubility in cubic {VA}l{N} by
                      metal-ion bombardment during pulsed magnetron sputtering:
                      film stress vs subplantation},
      journal      = {Journal of applied physics},
      volume       = {122},
      number       = {2},
      issn         = {1089-7550},
      address      = {Melville, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {FZJ-2018-01310},
      pages        = {025304 -},
      year         = {2017},
      ddc          = {530},
      pnm          = {QUANTUM MECHANICALLY GUIDED DESIGN OF WEAR-PROTECTIVE
                      COATINGS FOR POLYMER FORMING TOOLS $(jara0151_20161101)$},
      pid          = {$G:(DE-Juel1)jara0151_20161101$},
      typ          = {PUB:(DE-HGF)16},
      doi          = {10.1063/1.4991640},
      url          = {https://juser.fz-juelich.de/record/843758},
}