| Home > Publications database > Baugruppen und Werkstoffe für eine Heißwandanlage zur Züchtung von Galliumarsenid-Einkristallen |
| Book/Report | FZJ-2018-03568 |
; ; ;
1991
Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag
Jülich
Please use a persistent id in citations: http://hdl.handle.net/2128/18932
Report No.: Juel-2511
Abstract: Basic investigations to seal a hot-wall crystal pulling vessel against Arsen vapour leakage have been carried out. The wall material under investigation was either quartz or metal. The corrosion behaviour of metals, alloys, protective coatings and ceramics at 700°C against As-vapour has been examined. Based an these experiments, technically feasible solutions for disconnectable (langes out of different materials have been developed. Also, a valve is presented, that can be operatedat 700°C and which is leaktied in an As-vapour environment.
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