%0 Book Section
%A Rodenbücher, Christian
%A Wojtyniak, Marcin
%A Szot, K.
%T Conductive AFM for nanoscale analysis of high-k dielectric metal oxides
%C Cham
%I Springer
%M FZJ-2018-03778
%@ 978-3-030-15611-4 (print)
%B NanoScience and Technology
%P 29 - 70
%D 2019
%< Electrical Atomic Force Microscopy for Nanoelectronics
%X Conductive atomic force microscopy has become a valuable tool for investigation of electronic transport properties with utmost lateral resolution. In this chapter, we prevent an overview about C-AFM applications to high-k semiconductors, which are key materials for future energy-efficient information technology.
%F PUB:(DE-HGF)7
%9 Contribution to a book
%U <Go to ISI:>//WOS:000517403900002
%R 10.1007/978-3-030-15612-1_2
%U https://juser.fz-juelich.de/record/849637