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000849637 1001_ $$0P:(DE-Juel1)142194$$aRodenbücher, Christian$$b0$$eCorresponding author$$ufzj
000849637 245__ $$aConductive AFM for nanoscale analysis of high-k dielectric metal oxides
000849637 260__ $$aCham$$bSpringer$$c2019
000849637 29510 $$aElectrical Atomic Force Microscopy for Nanoelectronics
000849637 300__ $$a29 - 70
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000849637 4900_ $$aNanoScience and Technology
000849637 520__ $$aConductive atomic force microscopy has become a valuable tool for investigation of electronic transport properties with utmost lateral resolution. In this chapter, we prevent an overview about C-AFM applications to high-k semiconductors, which are key materials for future energy-efficient information technology.
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000849637 7001_ $$0P:(DE-HGF)0$$aWojtyniak, Marcin$$b1
000849637 7001_ $$0P:(DE-Juel1)130993$$aSzot, K.$$b2$$ufzj
000849637 773__ $$a10.1007/978-3-030-15612-1_2
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