TY  - CHAP
AU  - Rodenbücher, Christian
AU  - Wojtyniak, Marcin
AU  - Szot, K.
TI  - Conductive AFM for nanoscale analysis of high-k dielectric metal oxides
CY  - Cham
PB  - Springer
M1  - FZJ-2018-03778
SN  - 978-3-030-15611-4 (print)
T2  - NanoScience and Technology
SP  - 29 - 70
PY  - 2019
AB  - Conductive atomic force microscopy has become a valuable tool for investigation of electronic transport properties with utmost lateral resolution. In this chapter, we prevent an overview about C-AFM applications to high-k semiconductors, which are key materials for future energy-efficient information technology.
LB  - PUB:(DE-HGF)7
UR  - <Go to ISI:>//WOS:000517403900002
DO  - DOI:10.1007/978-3-030-15612-1_2
UR  - https://juser.fz-juelich.de/record/849637
ER  -