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@INBOOK{Rodenbcher:849637,
      author       = {Rodenbücher, Christian and Wojtyniak, Marcin and Szot, K.},
      title        = {{C}onductive {AFM} for nanoscale analysis of high-k
                      dielectric metal oxides},
      address      = {Cham},
      publisher    = {Springer},
      reportid     = {FZJ-2018-03778},
      isbn         = {978-3-030-15611-4 (print)},
      series       = {NanoScience and Technology},
      pages        = {29 - 70},
      year         = {2019},
      comment      = {Electrical Atomic Force Microscopy for Nanoelectronics},
      booktitle     = {Electrical Atomic Force Microscopy for
                       Nanoelectronics},
      abstract     = {Conductive atomic force microscopy has become a valuable
                      tool for investigation of electronic transport properties
                      with utmost lateral resolution. In this chapter, we prevent
                      an overview about C-AFM applications to high-k
                      semiconductors, which are key materials for future
                      energy-efficient information technology.},
      cin          = {IEK-3 / PGI-7 / JARA-FIT / IEK-14},
      cid          = {I:(DE-Juel1)IEK-3-20101013 / I:(DE-Juel1)PGI-7-20110106 /
                      $I:(DE-82)080009_20140620$ / I:(DE-Juel1)IEK-14-20191129},
      pnm          = {135 - Fuel Cells (POF3-135)},
      pid          = {G:(DE-HGF)POF3-135},
      typ          = {PUB:(DE-HGF)7},
      UT           = {WOS:000517403900002},
      doi          = {10.1007/978-3-030-15612-1_2},
      url          = {https://juser.fz-juelich.de/record/849637},
}