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100 1 _ |a Rodenbücher, Christian
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245 _ _ |a Conductive AFM for nanoscale analysis of high-k dielectric metal oxides
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295 1 0 |a Electrical Atomic Force Microscopy for Nanoelectronics
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520 _ _ |a Conductive atomic force microscopy has become a valuable tool for investigation of electronic transport properties with utmost lateral resolution. In this chapter, we prevent an overview about C-AFM applications to high-k semiconductors, which are key materials for future energy-efficient information technology.
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700 1 _ |a Szot, K.
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