Book/Report

FZJ-2018-03796

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Barrierenentladungen zur plasmagestützten Oberflächenbehandlung

Reitz, U. (Corresponding author)FZJ*

1992
Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag Jülich

Please use a persistent id in citations: http://hdl.handle.net/2128/19148

Report No.: Juel-2613

Abstract: This thesis deals with fundamental investigations of barrierdischarges in order to use this kind of gasdischarges for surface treatment. At first characteristic properties of barrier-discharges are pointed out. Barrier-discharges are consisting of microdischarges, which are in the centre of interest. The experimental and measuring equipment is described. A highvoltage-pulse-generator for steep voltage pulses of high repetition rates and a discharge vessel with a transparent electrode to observe the discharges have been developed for the investigations. The time- and spare-depending behaviour of barrier-discharges is investigated. Kind and pressure of the gas, the geometric arrangement and the supplied voltage are varied in order to achieve a uniform distribution of the microdischarges. The discharges are characterized by their current and voltage shapes. Discharge conditions suitable for the treatment of surfaces are discussed. The deposition of hydrocarbon thin films on glass substrates is demonstrated successfully. The process characteristics leading to a film of high quality are described. The influence of the discharge characteristics on the film properties is discussed.

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Contributing Institute(s):

1. Publikationen vor 2000 (PRE-2000)

Research Program(s):

1. 899 - ohne Topic (POF3-899) (POF3-899)

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Database coverage:

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