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Journal Article FZJ-2021-02442
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VO$_n$ Complexes in RTA Treated Czochralski Silicon Wafers Investigated by FTIR Spectroscopy

 ;  ;  ;

2018
Pennington, NJ

ECS transactions 86(10), 95 - 103 () [10.1149/08610.0095ecst]

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Classification:
Research Program(s):
  1. 899 - ohne Topic (POF3-899) (POF3-899)
  2. Modelling of Nucleation and Growth Processes for Silicon-Compatible Microelectronics (hfo06_20200501) (hfo06_20200501)
Database coverage:
Medline ; SCOPUS
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External Publications > Vita Publications
Workflow collections > In process
NIC
 Record created 2021-06-01, last modified 2022-03-10
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