Journal Article FZJ-2021-02443

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(Invited) Oxygen in Silicon: End of the Story?

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2018
Pennington, NJ

ECS transactions 86(10), 61 - 71 () [10.1149/08610.0061ecst]

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Research Program(s):
  1. 899 - ohne Topic (POF3-899) (POF3-899)
  2. Modelling of Nucleation and Growth Processes for Silicon-Compatible Microelectronics (hfo06_20200501) (hfo06_20200501)

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Medline ; SCOPUS
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 Record created 2021-06-01, last modified 2021-06-01



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