Journal Article

FZJ-2026-04635

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Highly crystalline superconducting TiN resonators grown on thermally reconstructed sapphire

Smart, T. J. (First author)FZJ* ; Neis, M.FZJ* ; Lorenz, J.FZJ* ; Guardascione, M. P.FZJ* ; Hanna, R.FZJ* ; Schleenvoigt, M.FZJ* ; Gao, Y.FZJ* ; Domnick, J.FZJ* ; Bennemann, B.FZJ* ; Rehman Jalil, A.FZJ* ; Hee Bae, J.FZJ* ; Bhardwaj, H.FZJ* ; Stefan Tautz, F.FZJ* ; Lüpke, F.FZJ* ; Grützmacher, D.FZJ* ; Barends, R.FZJ* ; Bushev, P. A.FZJ* ; Schüffelgen, P. (Corresponding author)FZJ*

2026
IOP Publ. Bristol

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Please use a persistent id in citations: doi:10.1088/1361-6668/aea939  doi:10.34734/FZJ-2026-04635

Abstract: High-quality crystalline growth of a thin film on sapphire requires sufficient substrate preparation,often achieved via aggressive chemical cleaning. Direct thermal reconstruction of the sapphire sub-strate via a CO2 laser beam may provide an alternative method to prepare the substrate for epitaxywithout the use of any chemical processing. In this work, we demonstrate that the thermal anneal-ing of sapphire into its (√31 × √31) R± 9◦ reconstruction is a valid alternative preparation tech-nique for sapphire substrates. TiN films grown via plasma-assisted molecular beam epitaxy uponthese substrates exhibit greater crystallinity than those grown on chemically-cleaned sapphire sub-strates. Superconducting resonators fabricated from these films exhibit similar performance, withmany possessing internal quality factors at single photon levels greater than 106 for both substratepreparation methods.

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Contributing Institute(s):

1. Quantum Nanoscience (PGI-3)
2. Halbleiter-Nanoelektronik (PGI-9)
3. JARA Institut Green IT (PGI-10)
4. Quantum Computing (PGI-13)

Research Program(s):

1. 5213 - Quantum Nanoscience (POF4-521) (POF4-521)
2. 5222 - Exploratory Qubits (POF4-522) (POF4-522)
3. BMBF 13N16149 - QSolid - Quantencomputer im Festkörper (BMBF-13N16149) (BMBF-13N16149)
4. OpenSuperQPlus100 - Open Superconducting Quantum Computers (OpenSuperQPlus) (101113946) (101113946)

Appears in the scientific report 2026

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Database coverage:
; ; ; Clarivate Analytics Master Journal List ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; Essential Science Indicators ; IF < 5 ; JCR ; National-Konsortium ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

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