Journal Article FZJ-2013-06024

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Behavior of locally injected charges in high-k nanolayers of LaScO3 insulator on a Si substrate

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2013
Springer Science + Business Media Berlin

Technical physics letters 39(5), 427 - 430 () [10.1134/S1063785013050039]

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Abstract: A charge leakage in LaScO3 nanolayers on a Si substrate has been investigated by Kelvin probe microscopy. A charge leakage from the LaScO3 layer to the LaScO3/Si interface layer with a subsequent lateral charge spreading in the interface layer and simultaneous leakage to the Si substrate has been revealed in this system. A lateral charge spreading has not been directly observed in the LaScO3 layer.

Classification:

Contributing Institute(s):
  1. Halbleiter-Nanoelektronik (PGI-9)
  2. Jülich-Aachen Research Alliance - Fundamentals of Future Information Technology (JARA-FIT)
Research Program(s):
  1. 421 - Frontiers of charge based Electronics (POF2-421) (POF2-421)

Appears in the scientific report 2013
Database coverage:
JCR ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection ; Zoological Record
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 Record created 2013-12-02, last modified 2021-01-29


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