Home > Publications database > Behavior of locally injected charges in high-k nanolayers of LaScO3 insulator on a Si substrate |
Journal Article | FZJ-2013-06024 |
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2013
Springer Science + Business Media
Berlin
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Please use a persistent id in citations: doi:10.1134/S1063785013050039
Abstract: A charge leakage in LaScO3 nanolayers on a Si substrate has been investigated by Kelvin probe microscopy. A charge leakage from the LaScO3 layer to the LaScO3/Si interface layer with a subsequent lateral charge spreading in the interface layer and simultaneous leakage to the Si substrate has been revealed in this system. A lateral charge spreading has not been directly observed in the LaScO3 layer.
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