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| Hauptseite > Publikationsdatenbank > As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering |
| Hauptseite > Publikationsdatenbank > As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering |
| Journal Article | PreJuSER-22597 |
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2012
Elsevier
Amsterdam [u.a.]
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Please use a persistent id in citations: doi:10.1016/j.tsf.2011.04.098
Abstract: This work presents as-grown textured ZnO:Al films by rf magnetron sputtering initiated by pre-treatment of glass substrate with mixed argon and oxygen ions. A 650 nm thick of this film exhibits surface texture features with lateral size around 500 nm; the resistivity is below 5 x 10(-4) Omega . cm and the transparency in the near-infrared spectral range is high (>80% at 1000 nm). Microcrystalline silicon thin film solar cells grown on the textured glass exhibit excellent light trapping effect with a short circuit current density of 18.2 mA/cm(2). (C) 2011 Elsevier B.V. All rights reserved.
Keyword(s): J ; Ion beam treatment (auto) ; Magnetron sputtering (auto) ; ZnO:Al films (auto) ; TCO (auto) ; Solar cells (auto)
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