| Home > Publications database > Wedgelike ultrathin epitaxial BaTiO3 films for studies of scaling effects in ferroelectrics |
| Journal Article | PreJuSER-2728 |
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2008
American Institute of Physics
Melville, NY
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Please use a persistent id in citations: http://hdl.handle.net/2128/17138 doi:10.1063/1.2972135
Abstract: To study ferroelectric size effects in heteroepitaxial SrRuO3/BaTiO3/SrRuO3 capacitors, ultrathin BaTiO3 layers were deposited in wedge form across SrTiO3 substrates. The wedgelike films were fabricated by using either an off-center substrate-target geometry or via a moveable shutter during high-pressure sputter deposition. The crystallinity, composition, and surface roughness along wedgelike BaTiO3 films were verified by x-ray diffraction, Rutherford backscattering spectrometry, and atomic force microscopy, respectively. The electrical measurements performed at 77 K showed that, despite progressive reduction in remanent polarization as the film thickness decreases even the 3.5-nm-thick BaTiO3 film retains a large remanent polarization of 28 mu C/cm(2). (C) 2008 American Institute of Physics.
Keyword(s): J
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