Journal Article PreJuSER-43842

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Formation of Si/Ge Nanostructures at Surfaces by Self-organization

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2004
IOP Publ. Bristol

Journal of physics / Condensed matter 16, s1535 - s1551 () [10.1088/0953-8984/16/17/006]

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Abstract: The growth of kinetically self-organized 2D islands in Si/Si(111) epitaxy is described. The island size distribution for this system was measured using scanning tunnelling microscopy (STM). The influence of surface reconstructions on growth kinetics is studied directly using a method of simultaneous deposition and STM scanning. For the case of growth of Si islands on Si(111), lateral growth of rows of the width of the 7 x 7 reconstruction unit cell at the edges of two-dimensional islands leads to the formation of 'magic' island sizes. The evolution of the size and shape of individual {105} faceted Ge islands (hut clusters) on Si(001) is measured during growth. A slower growth rate is observed when an island grows to larger sizes. This behaviour can be explained by kinetically self-limiting growth. The potential formation of thermodynamically stable strained islands of a specific size is discussed. The formation of 2D Si/Ge nanostructures at pre-existing defects is studied. The step flow growth mode is used to fabricate Si and Ge nanowires with a width of 3.5 nm and a thickness of one atomic layer (0.3 nm) by self-assembly. One atomic layer of Bi terminating the surface is used to distinguish between the elements Si and Ge. A difference in apparent height is measured in STM images for Si and Ge. Also different kinds of two-dimensional Si/Ge nanostructure such as alternating Si and Ge nanorings having a width of 5-10 nm were grown.

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Note: Record converted from VDB: 12.11.2012

Contributing Institute(s):
  1. Institut für Grenzflächen und Vakuumtechnologien (ISG-3)
Research Program(s):
  1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

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 Record created 2012-11-13, last modified 2018-02-10



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