Journal Article

PreJuSER-52012

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Preparation of transparent Nb-two-dimensional electron gas contacts by using electron cyclotron resonance

Schäpers, T.FZJ* ; Müller, S. J.FZJ* ; Crecelius, G.FZJ* ; Hardtdegen, H.FZJ* ; Lüth, H.FZJ*

2000
American Institute of Physics Melville, NY

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Please use a persistent id in citations: http://hdl.handle.net/2128/2340

Abstract: The effect of electron cyclotron resonance plasma cleaning on the contact resistance between a superconducting Nb layer and a two-dimensional electron gas in a strained InxGa1-xAs/InP heterostructure is investigated. Cleaning by a He/H plasma results in a rough semiconductor surface and a high interface resistance. In contrast, by using a pure He plasma a smooth semiconductor surface with a considerably lower interface resistance is obtained. (C) 2000 American Institute of Physics. [S0021-8979(00)10119-7].

Keyword(s): J

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Institut für Schicht- und Ionentechnik (ISI)

Research Program(s):

1. Halbleiterschichtsysteme und Mesoskopische Strukturen (29.89.0)

Appears in the scientific report 2000
Notes: This version is available at the following Publisher URL: http://jap.aip.org

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