Talk (non conference)

PreJuSER-5710

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Fortschritte Ionenstrahl-Sputteranlage

Damm, T.FZJ*

2002

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Elektronische Eigenschaften (IFF-IEE)

Research Program(s):

1. Methoden und Systeme der Informationstechnik (I02)

Appears in the scientific report 2002

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